Takefumi Kanda, Minoru Kuribayashi Kurosawa＊, and Toshiro Higuchi＊＊ (＊Tokyo Institute of Technology,＊＊The University of Tokyo) Sensitivity of a miniaturized touch probe sensor using PZT thin film Ultrasonics, Vol. 40, No. 1-8, pp.61-65 2002.5